Introduction

In Business Line Applications, we create software products that run in most modern semiconductor factories in the world. Our department Development and Engineering (D&E) Process Window Control (PWC) develops, integrates, and qualifies functional modules in products used to monitor and control on-product performance under high-volume manufacturing conditions. We believe that deep understanding of on-product performance and its contributors enables the development of the technology roadmap.

Your assignment

The goal of this assignment is to develop a rigorous and comprehensive formalization of on-product overlay control. Wafer alignment and overlay control are inherently interconnected, and the control mechanisms through the stack for both alignment and overlay cannot be treated independently. This interdependency results in complex control scenarios over multiple dimensions, e.g., temporal, layer, and spatial domains, that are...